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Standards [CURRENT]

NF X21-070 ; NF ISO 14237:2010-09-01
Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

Title (German)

Chemische Oberflächenanalyse . Sekundärionenmassenspektrometrie . Bestimmung des Elementgehalts von Bor in Silizium unter Verwendung gleichförmig dotierter Materialien

Edition 2010-09-01
Original language French
Price from 79.60 €
Table of contents