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Semiconductor devices Performance evaluation of semiconductor components and equipment - Part 1: Transmittance evaluation method of EUV pellicle

Terminology

Process equipment

IEC 61024-1, Ed.2: Protection of structures against fibre, explosion and life hazard

Fire tests for building elements and components - Fire testing of service installations - Part 1: Penetration seals

Hydronic systems in heating, cooling and ventilation installations - Part 1: Basics of hydronic balancing

Project

DIN 6847-7

Medical electron accelerator - Part 7: Acceptance and constancy testing of X-ray radiation-based equipment for image-guided radiotherapy

Hydraulic balancing of heating, cooling and ventilation systems - Part 4: Temperature-based alternatives to hydraulic balancing

Oil and gas industries including lower carbon energy - Specific requirements for offshore structures - Part 2: Seismic design procedures and criteria

Safety of machinery - Permanent means of access to machinery - Part 1: Choice of fixed means of access between two levels

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