DIN Standards Committee Materials Testing
Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors
Begin
2024-05-24
Planned document number
ISO/DIS 19383
Responsible national committee
NA 062-01-61 AA - Measuring and test methods for coatings and coating systems
Responsible international committee
ISO/TC 107/WG 5 - Atomic layer deposition
draft standard
Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors
2025-05
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