2. Getting involved
  3. Standards Committees
  4. NMP
NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees
Draft standard [New]

DIN 50450-2
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 2: Determination of Oxygen impurities in Nitrogen, Argon, Helium, Neon and Hydrogen using a galvanic cell

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger- und Dotiergasen - Teil 2: Bestimmung der Sauerstoffverunreinigung in Stickstoff, Argon, Helium, Neon und Wasserstoff mittels einer galvanischen Messzelle

Responsible national committee

NA 062-05-73 AA - Gas analysis and gas quality  

Edition 2025-07
Publication 2025-06-20
Public enquiry period until 2025-08-20
Original language German
Price from 50.70 €
Read draft and comment Order from DIN Media
Table of contents

Contact

Dipl.-Ing.

Florian Rieger

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2598
Fax: +49 30 2601-42598

Send message to contact