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NA 027

DIN Standards Committee Optics and Precision Mechanics

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Standards [New]

DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices

Title (German)

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 3: Ableitung von Korrekturwerten für taktile Messgeräte

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems

Edition 2025-05

Original language German

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Table of contents

PDF (DE)

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Terminology

DIN Standards Committee Optics and Precision Mechanics

DIN 32567-3 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices

Responsible national committee

Anna Perbliess

DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices