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NA 027

DIN Standards Committee Optics and Precision Mechanics

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Standards [CURRENT]

DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Title (German)

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems  

Edition 2007-12
Original language German
Price from 58.30 €
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Table of contents

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